Gds2Mesh is a 3D TCAD model building tool that imports GDSII layouts and then combines predefined, customizable process rules to generate 3D device models.
0.13um CMOS NAND gate standard cell layout (left), and GDS2Mesh generated TCAD model (right)
0.13um CMOS D-Trigger Standard Cell Layout (top), and GDS2Mesh generated TCAD model (below)
The 0.13um process rule file first extracts the geometric information of each level from the layout, and then constructs the 3D geometry of the device through stretching and other geometric operations. The area of the doping profile also needs to be determined based on the layout information.
The CSG engine can generate tilted STI sidewalls, sleek STI corners, beaks, and other fine structures. The mesh is automatically generated, and the mesh near the channel and the junction is refined to ensure the accuracy of the simulation. The resulting device structure can be imported directly into the Genius Execution Device emulation.